Conformal hydrophobic coatings prepared using atomic layer deposition seed layers and non-chlorinated hydrophobic precursors Journal Article

Overview

CU Boulder Authors

publication date

May 1, 2005

Full Author List

Herrmann CF; Delrio FW; Bright VM; George SM

published in

Journal of Micromechanics and Microengineering Journal

Other Profiles

Digital Object Identifier (DOI)

10.1088/0960-1317/15/5/013

Additional Document Info

start page

984

end page

992

volume

15

issue

5