Investigation of the defect density in ultra-thin Al2O3 films grown using atomic layer deposition Journal Article uri icon

Overview

publication date

  • February 15, 2011

Full Author List

  • Zhang Y; Seghete D; Abdulagatov A; Gibbs Z; Cavanagh A; Yang R; George S; Lee Y-C

Other Profiles

Additional Document Info

start page

  • 3334

end page

  • 3339

volume

  • 205

issue

  • 10