Particle beam mass spectrometer measurements of particle formation during low pressure chemical vapor deposition of polysilicon and SiO 2 films Journal Article uri icon


publication date

  • March 1, 1996

Full Author List

  • McMurry PH; Nijhawan S; Rao N; Ziemann P; Kittelson DB; Campbell S

Other Profiles

Additional Document Info

start page

  • 582

end page

  • 587


  • 14


  • 2