Particle beam mass spectrometer measurements of particle formation during low pressure chemical vapor deposition of polysilicon and SiO2 films Journal Article uri icon

Overview

publication date

  • March 1, 1996

Date in CU Experts

  • January 29, 2015 10:43 AM

Full Author List

  • McMurry PH; Nijhawan S; Rao N; Ziemann P; Kittelson DB; Campbell S

author count

  • 6

Other Profiles

International Standard Serial Number (ISSN)

  • 0734-2101

Electronic International Standard Serial Number (EISSN)

  • 1520-8559

Additional Document Info

start page

  • 582

end page

  • 587

volume

  • 14

issue

  • 2