Particle beam mass spectrometer measurements of particle formation during low pressure chemical vapor deposition of polysilicon and SiO2 films
Journal Article
Overview
publication date
- March 1, 1996
has restriction
- closed
Date in CU Experts
- January 29, 2015 10:43 AM
Full Author List
- McMurry PH; Nijhawan S; Rao N; Ziemann P; Kittelson DB; Campbell S
author count
- 6
published in
Other Profiles
International Standard Serial Number (ISSN)
- 0734-2101
Electronic International Standard Serial Number (EISSN)
- 1520-8559
Digital Object Identifier (DOI)
Additional Document Info
start page
- 582
end page
- 587
volume
- 14
issue
- 2