Growth and Characterization of Al2O3 Atomic Layer Deposition Films on sp(2)-Graphitic Carbon Substrates Using NO2/Trimethylaluminum Pretreatment Journal Article uri icon

Overview

publication date

  • June 10, 2015

Full Author List

  • Young MJ; Musgrave CB; George SM

Other Profiles

Additional Document Info

start page

  • 12030

end page

  • 12037

volume

  • 7

issue

  • 22