Atomic layer deposition of ultrathin platinum films on tungsten atomic layer deposition adhesion layers: Application to high surface area substrates Journal Article uri icon

Overview

publication date

  • January 1, 2015

Full Author List

  • Clancey JW; Cavanagh AS; Kukreja RS; Kongkanand A; George SM

Other Profiles

Additional Document Info

volume

  • 33

issue

  • 1