High contrast 3D imaging of surfaces near the wavelength limit using tabletop EUV ptychography Journal Article uri icon


publication date

  • November 1, 2015

Full Author List

  • Zhang B; Gardner DF; Seaberg MD; Shanblatt ER; Kapteyn HC; Murnane MM; Adams DE

Other Profiles

Additional Document Info

start page

  • 98

end page

  • 104


  • 158