Thermo-mechanical properties of alumina films created using the atomic layer deposition technique Journal Article uri icon

Overview

publication date

  • November 1, 2010

Date in CU Experts

  • September 3, 2013 12:43 PM

Full Author List

  • Miller DC; Foster RR; Jen S-H; Bertrand JA; Cunningham SJ; Morris AS; Lee Y-C; George SM; Dunn ML

author count

  • 9

citation count

  • 70

Other Profiles

International Standard Serial Number (ISSN)

  • 0924-4247

Additional Document Info

start page

  • 58

end page

  • 67

volume

  • 164

issue

  • 1-2