Thermo-mechanical properties of alumina films created using the atomic layer deposition technique Journal Article uri icon

Overview

publication date

  • November 1, 2010

Full Author List

  • Miller DC; Foster RR; Jen S-H; Bertrand JA; Cunningham SJ; Morris AS; Lee Y-C; George SM; Dunn ML

Other Profiles

Additional Document Info

start page

  • 58

end page

  • 67

volume

  • 164

issue

  • 1-2