Thermo-mechanical properties of alumina films created using the atomic layer deposition technique
Journal Article
Overview
publication date
- November 1, 2010
has restriction
- closed
Date in CU Experts
- September 3, 2013 12:43 PM
Full Author List
- Miller DC; Foster RR; Jen S-H; Bertrand JA; Cunningham SJ; Morris AS; Lee Y-C; George SM; Dunn ML
author count
- 9
citation count
- 81
published in
Other Profiles
International Standard Serial Number (ISSN)
- 0924-4247
Digital Object Identifier (DOI)
Additional Document Info
start page
- 58
end page
- 67
volume
- 164
issue
- 1-2