Processing and characterization of silicon carbon-nitride ceramics: application of electrical properties towards MEMS thermal actuators uri icon

Overview

publication date

  • January 15, 2003

has restriction

  • closed

Date in CU Experts

  • September 3, 2013 12:43 PM

Full Author List

  • Liew LA; Saravanan RA; Bright VM; Dunn ML; Daily JW; Raj R

author count

  • 6

citation count

  • 60

Other Profiles

International Standard Serial Number (ISSN)

  • 0924-4247

Additional Document Info

start page

  • 171

end page

  • 181

volume

  • 103

issue

  • 1-2

number

  • PII S0924-4247(02)00330-8