Processing and characterization of silicon carbon-nitride ceramics: application of electrical properties towards MEMS thermal actuators Journal Article uri icon

Overview

publication date

  • January 15, 2003

Full Author List

  • Liew LA; Saravanan RA; Bright VM; Dunn ML; Daily JW; Raj R

Other Profiles

Additional Document Info

start page

  • 171

end page

  • 181

volume

  • 103

issue

  • 1-2