Application of microforging to SiCN MEMS fabrication Journal Article uri icon

Overview

publication date

  • January 1, 2002

Full Author List

  • Liu YP; Liew LA; Luo RL; An LN; Dunn ML; Bright VM; Daily JW; Raj R

Other Profiles

Additional Document Info

start page

  • 143

end page

  • 151

volume

  • 95

issue

  • 2-3