Application of microforging to SiCN MEMS fabrication uri icon

Overview

publication date

  • January 1, 2002

has restriction

  • closed

Date in CU Experts

  • September 3, 2013 12:44 PM

Full Author List

  • Liu YP; Liew LA; Luo RL; An LN; Dunn ML; Bright VM; Daily JW; Raj R

author count

  • 8

citation count

  • 68

Other Profiles

International Standard Serial Number (ISSN)

  • 0924-4247

Additional Document Info

start page

  • 143

end page

  • 151

volume

  • 95

issue

  • 2-3