Fabrication of SiCN MEMS by photopolymerization of pre-ceramic polymer? uri icon

Overview

publication date

  • January 1, 2002

has restriction

  • closed

Date in CU Experts

  • September 3, 2013 12:44 PM

Full Author List

  • Liew LA; Liu YP; Luo RL; Cross T; An LN; Bright VM; Dunn ML; Daily JW; Raj R

author count

  • 9

citation count

  • 161

Other Profiles

International Standard Serial Number (ISSN)

  • 0924-4247

Additional Document Info

start page

  • 120

end page

  • 134

volume

  • 95

issue

  • 2-3