Fabrication of SiCN MEMS by photopolymerization of pre-ceramic polymer?
Journal Article
Overview
publication date
- January 1, 2002
Full Author List
- Liew LA; Liu YP; Luo RL; Cross T; An LN; Bright VM; Dunn ML; Daily JW; Raj R
published in
Other Profiles
Digital Object Identifier (DOI)
Additional Document Info
start page
- 120
end page
- 134
volume
- 95
issue
- 2-3