Fabrication of SiCN MEMS by photopolymerization of pre-ceramic polymer? Journal Article uri icon

Overview

publication date

  • January 1, 2002

Full Author List

  • Liew LA; Liu YP; Luo RL; Cross T; An LN; Bright VM; Dunn ML; Daily JW; Raj R

Other Profiles

Additional Document Info

start page

  • 120

end page

  • 134

volume

  • 95

issue

  • 2-3