Fabrication of SiCN MEMS by photopolymerization of pre-ceramic polymer?

Overview

CU Boulder Authors

• Bright, Victor Mark
• Daily, John W
• Raj, Rishi

publication date

• January 1, 2002

has restriction

• closed

Date in CU Experts

• September 3, 2013 12:44 PM

Full Author List

• Liew LA; Liu YP; Luo RL; Cross T; An LN; Bright VM; Dunn ML; Daily JW; Raj R

author count

• 9

citation count

• 161

published in

• Sensors and Actuators A: Physical 

Other Profiles

International Standard Serial Number (ISSN)

• 0924-4247

Digital Object Identifier (DOI)

• https://doi.org/10.1016/s0924-4247(01)00723-3

Additional Document Info

start page

• 120

end page

• 134

volume

• 95

issue

• 2-3