Ceramic MEMS - New materials, innovative processing and future applications Journal Article uri icon

Overview

publication date

  • May 1, 2001

Full Author List

  • Liew LA; Zhang WG; An LN; Shah S; Luo RL; Liu YP; Cross T; Dunn ML; Bright V; Daily JW

Additional Document Info

start page

  • 25

end page

  • 30

volume

  • 80

issue

  • 5