Fabrication of SiCN ceramic MEMS using injectable polymer-precursor technique
Journal Article
Overview
publication date
- March 20, 2001
Full Author List
- Liew LA; Zhang WG; Bright VM; An LN; Dunn ML; Raj R
published in
Other Profiles
Digital Object Identifier (DOI)
Additional Document Info
start page
- 64
end page
- 70
volume
- 89
issue
- 1-2