Fabrication of SiCN ceramic MEMS using injectable polymer-precursor technique Journal Article uri icon

Overview

publication date

  • March 20, 2001

has restriction

  • closed

Date in CU Experts

  • September 3, 2013 12:44 PM

Full Author List

  • Liew LA; Zhang WG; Bright VM; An LN; Dunn ML; Raj R

author count

  • 6

citation count

  • 145

Other Profiles

International Standard Serial Number (ISSN)

  • 0924-4247

Additional Document Info

start page

  • 64

end page

  • 70

volume

  • 89

issue

  • 1-2