Fabrication of SiCN ceramic MEMS using injectable polymer-precursor technique Journal Article uri icon

Overview

publication date

  • March 20, 2001

Full Author List

  • Liew LA; Zhang WG; Bright VM; An LN; Dunn ML; Raj R

Other Profiles

Additional Document Info

start page

  • 64

end page

  • 70

volume

  • 89

issue

  • 1-2