TiO2 atomic layer deposition on ZrO2 particles using alternating exposures of TiCl4 and H2O Journal Article uri icon

Overview

publication date

  • March 30, 2004

Full Author List

  • Ferguson JD; Yoder AR; Weimer AW; George SM

Other Profiles

Additional Document Info

start page

  • 393

end page

  • 404

volume

  • 226

issue

  • 4