Atomic layer deposition of Al2O3 and SiO2 on BN particles using sequential surface reactions Journal Article uri icon

Overview

publication date

  • August 1, 2000

Date in CU Experts

  • September 3, 2013 12:55 PM

Full Author List

  • Ferguson JD; Weimer AW; George SM

author count

  • 3

citation count

  • 52

Other Profiles

International Standard Serial Number (ISSN)

  • 0169-4332

Additional Document Info

start page

  • 280

end page

  • 292

volume

  • 162