Atomic layer deposition enabled interconnect technology for vertical nanowire arrays Journal Article uri icon

Overview

publication date

  • January 1, 2011

Date in CU Experts

  • September 3, 2013 3:17 AM

Full Author List

  • Cheng J-H; Seghete D; Lee M; Schlager JB; Bertness KA; Sanford NA; Yang R; George SM; Lee YC

author count

  • 9

citation count

  • 2

Other Profiles

International Standard Serial Number (ISSN)

  • 0924-4247

Additional Document Info

start page

  • 107

end page

  • 114

volume

  • 165

issue

  • 1