Atomic layer deposition enabled interconnect technology for vertical nanowire arrays Journal Article uri icon

Overview

publication date

  • January 1, 2011

Full Author List

  • Cheng J-H; Seghete D; Lee M; Schlager JB; Bertness KA; Sanford NA; Yang R; George SM; Lee YC

Other Profiles

Additional Document Info

start page

  • 107

end page

  • 114

volume

  • 165

issue

  • 1