Electron-enhanced atomic layer deposition of silicon thin films at room temperature Journal Article uri icon

Overview

publication date

  • January 1, 2018

has restriction

  • hybrid

Date in CU Experts

  • January 19, 2018 10:43 AM

Full Author List

  • Sprenger JK; Sun H; Cavanagh AS; George SM

author count

  • 4

citation count

  • 19

Other Profiles

International Standard Serial Number (ISSN)

  • 0734-2101

Electronic International Standard Serial Number (EISSN)

  • 1520-8559

Additional Document Info

volume

  • 36

issue

  • 1

number

  • ARTN 01A118