A methodology for analyzing the variability in the performance of a MEMS actuator made from a novel ceramic Journal Article uri icon

Overview

publication date

  • October 15, 2004

Full Author List

  • Kong JS; Frangopol DM; Raulli M; Maute K; Saravanan RA; Liew LA; Raj R

Other Profiles

Additional Document Info

start page

  • 336

end page

  • 344

volume

  • 116

issue

  • 2