In-situ real-time ellipsometric investigations during the atomic layer deposition of ruthenium: A process development from [(ethylcyclopentadienyl)(pyrrolyl)ruthenium] and molecular oxygen Journal Article uri icon

Overview

publication date

  • January 1, 2012

has restriction

  • closed

Date in CU Experts

  • December 18, 2018 4:31 AM

Full Author List

  • Knaut M; Junige M; Albert M; Bartha JW

author count

  • 4

citation count

  • 28

Other Profiles

International Standard Serial Number (ISSN)

  • 0734-2101

Electronic International Standard Serial Number (EISSN)

  • 1520-8559

Additional Document Info

volume

  • 30

issue

  • 1

number

  • ARTN 01A151