Atomic layer deposition of hafnium oxide: A detailed reaction mechanism from first principles Journal Article uri icon

Overview

publication date

  • August 1, 2002

Date in CU Experts

  • May 29, 2019 3:44 AM

Full Author List

  • Widjaja Y; Musgrave CB

author count

  • 2

citation count

  • 94

Other Profiles

International Standard Serial Number (ISSN)

  • 0021-9606

Additional Document Info

start page

  • 1931

end page

  • 1934

volume

  • 117

issue

  • 5