Theoretical study of the chemical vapor deposition of (100) silicon from silane Journal Article uri icon

Overview

publication date

  • December 15, 2001

Date in CU Experts

  • May 29, 2019 3:44 AM

Full Author List

  • Kang JK; Musgrave CB

author count

  • 2

citation count

  • 29

Other Profiles

International Standard Serial Number (ISSN)

  • 2469-9950

Electronic International Standard Serial Number (EISSN)

  • 2469-9969

Additional Document Info

volume

  • 64

issue

  • 24

number

  • ARTN 245330