Atomic layer deposition of hafnium oxide from hafnium chloride and water Journal Article uri icon

Overview

publication date

  • September 10, 2008

Full Author List

  • Mukhopadhyay AB; Musgrave CB; Sanz JF

Other Profiles

Additional Document Info

start page

  • 11996

end page

  • 12006

volume

  • 130

issue

  • 36