Atomic layer deposition of hafnium oxide from hafnium chloride and water uri icon

Overview

publication date

  • September 10, 2008

has restriction

  • closed

Date in CU Experts

  • May 29, 2019 3:44 AM

Full Author List

  • Mukhopadhyay AB; Musgrave CB; Sanz JF

author count

  • 3

citation count

  • 37

Other Profiles

International Standard Serial Number (ISSN)

  • 0002-7863

Electronic International Standard Serial Number (EISSN)

  • 1520-5126

Additional Document Info

start page

  • 11996

end page

  • 12006

volume

  • 130

issue

  • 36