The mechanism of HF/H2O chemical etching of SiO2 Journal Article uri icon

Overview

publication date

  • January 1, 2002

Date in CU Experts

  • May 29, 2019 3:44 AM

Full Author List

  • Kang JK; Musgrave CB

author count

  • 2

citation count

  • 86

Other Profiles

International Standard Serial Number (ISSN)

  • 0021-9606

Additional Document Info

start page

  • 275

end page

  • 280

volume

  • 116

issue

  • 1