Rotary reactor for atomic layer deposition on large quantities of nanoparticles Journal Article

Overview

CU Boulder Authors

publication date

January 1, 2007

Full Author List

McCormick JA; Cloutier BL; Weimer AW; George SM

published in

Journal of Vacuum Science and Technology Part A: International Journal Devoted to Vacuum, Surfaces, and Films Journal

Other Profiles

Digital Object Identifier (DOI)

10.1116/1.2393299

Additional Document Info

start page

67

end page

74

volume

25

issue

1