Atomic layer deposition of aluminum oxyfluoride thin films with tunable stoichiometry Journal Article uri icon

Overview

publication date

  • March 1, 2020

has restriction

  • closed

Date in CU Experts

  • March 10, 2020 10:35 AM

Full Author List

  • Mahuli N; Cavanagh AS; George SM

author count

  • 3

citation count

  • 4

Other Profiles

International Standard Serial Number (ISSN)

  • 0734-2101

Electronic International Standard Serial Number (EISSN)

  • 1520-8559

Additional Document Info

volume

  • 38

issue

  • 2