Thermal etching of AlF3 and thermal atomic layer etching of Al2O3 Journal Article uri icon

Overview

publication date

  • March 1, 2020

has restriction

  • closed

Date in CU Experts

  • March 24, 2020 5:36 AM

Full Author List

  • Fischer A; Routzahn A; Lee Y; Lill T; George SM

author count

  • 5

citation count

  • 16

Other Profiles

International Standard Serial Number (ISSN)

  • 0734-2101

Electronic International Standard Serial Number (EISSN)

  • 1520-8559

Additional Document Info

volume

  • 38

issue

  • 2

number

  • ARTN 022603