History of atomic layer deposition and its relationship with the American Vacuum Society (vol 31, 050818, 2013) Journal Article uri icon

Overview

publication date

  • May 1, 2020

Full Author List

  • Parsons GN; Elam JW; George SM; Haukka S; Jeon H; (Erwin) Kessels WMM; Leskelae M; Poodt P; Ritala M; Rossnagel SM

Other Profiles

Additional Document Info

volume

  • 38

issue

  • 3