History of atomic layer deposition and its relationship with the American Vacuum Society (vol 31, 050818, 2013) Journal Article uri icon

Overview

publication date

  • May 1, 2020

has restriction

  • bronze

Date in CU Experts

  • April 7, 2020 6:12 AM

Full Author List

  • Parsons GN; Elam JW; George SM; Haukka S; Jeon H; (Erwin) Kessels WMM; Leskelae M; Poodt P; Ritala M; Rossnagel SM

author count

  • 10

citation count

  • 2

Other Profiles

International Standard Serial Number (ISSN)

  • 0734-2101

Electronic International Standard Serial Number (EISSN)

  • 1520-8559

Additional Document Info

volume

  • 38

issue

  • 3

number

  • ARTN 037001