Atomic layer deposited protective coatings for micro-electromechanical systems Journal Article uri icon

Overview

publication date

  • January 15, 2003

Full Author List

  • Hoivik ND; Elam JW; Linderman RJ; Bright VM; George SM; Lee YC

Other Profiles

Additional Document Info

start page

  • 100

end page

  • 108

volume

  • 103

issue

  • 1-2