Atomic layer deposited protective coatings for micro-electromechanical systems
Journal Article
Overview
publication date
- January 15, 2003
Full Author List
- Hoivik ND; Elam JW; Linderman RJ; Bright VM; George SM; Lee YC
published in
Other Profiles
Digital Object Identifier (DOI)
Additional Document Info
start page
- 100
end page
- 108
volume
- 103
issue
- 1-2