Conversion efficiency or alkoxide precursor to oxide films grown by an ultrasonic-assisted, pulsed liquid injection, metalorganic chemical vapor deposition (pulsed-CVD) process Journal Article uri icon

Overview

publication date

  • June 1, 1999

Full Author List

  • Krumdieck S; Raj R

Additional Document Info

start page

  • 1605

end page

  • 1607

volume

  • 82

issue

  • 6