Selection of TiN as the interconnect material for measuring the electrical conductivity of polymer-derived SiCN at high temperatures Journal Article uri icon

Overview

publication date

  • January 1, 2007

Full Author List

  • Ryu H-Y; Raj R

Other Profiles

Additional Document Info

start page

  • 295

end page

  • 297

volume

  • 90

issue

  • 1