Selection of TiN as the interconnect material for measuring the electrical conductivity of polymer-derived SiCN at high temperatures
Journal Article
Overview
publication date
- January 1, 2007
Full Author List
- Ryu H-Y; Raj R
published in
Other Profiles
Digital Object Identifier (DOI)
Additional Document Info
start page
- 295
end page
- 297
volume
- 90
issue
- 1