Alternative dielectric films for rf MEMS capacitive switches deposited using atomic layer deposited Al2O3/ZnO alloys Journal Article uri icon

Overview

publication date

  • March 30, 2007

Full Author List

  • Herrmann CF; DelRio FW; Miller DC; George SM; Bright VM; Ebel JL; Strawser RE; Cortez R; Leedy KD

Other Profiles

Additional Document Info

start page

  • 262

end page

  • 272

volume

  • 135

issue

  • 1