Alternative dielectric films for rf MEMS capacitive switches deposited using atomic layer deposited Al2O3/ZnO alloys
Journal Article
Overview
publication date
- March 30, 2007
Full Author List
- Herrmann CF; DelRio FW; Miller DC; George SM; Bright VM; Ebel JL; Strawser RE; Cortez R; Leedy KD
published in
Other Profiles
Digital Object Identifier (DOI)
Additional Document Info
start page
- 262
end page
- 272
volume
- 135
issue
- 1