Alternative dielectric films for rf MEMS capacitive switches deposited using atomic layer deposited Al2O3/ZnO alloys Journal Article uri icon

Overview

publication date

  • March 30, 2007

Date in CU Experts

  • September 6, 2013 12:44 PM

Full Author List

  • Herrmann CF; DelRio FW; Miller DC; George SM; Bright VM; Ebel JL; Strawser RE; Cortez R; Leedy KD

author count

  • 9

citation count

  • 45

Other Profiles

International Standard Serial Number (ISSN)

  • 0924-4247

Additional Document Info

start page

  • 262

end page

  • 272

volume

  • 135

issue

  • 1