Alternative dielectric films for rf MEMS capacitive switches deposited using atomic layer deposited Al2O3/ZnO alloys Journal Article

Overview

CU Boulder Authors

publication date

March 30, 2007

Full Author List

Herrmann CF; DelRio FW; Miller DC; George SM; Bright VM; Ebel JL; Strawser RE; Cortez R; Leedy KD

published in

Sensors and Actuators A: Physical Journal

Other Profiles

Digital Object Identifier (DOI)

10.1016/j.sna.2006.07.002

Additional Document Info

start page

262

end page

272

volume

135

issue

1