The mechanical properties of atomic layer deposited alumina for use in micro- and nano-electromechanical systems
Journal Article
Overview
publication date
- August 14, 2006
Full Author List
- Tripp MK; Stampfer C; Miller DC; Helbling T; Hermann CF; Hierold C; Gall K; George SM; Bright VM
published in
Other Profiles
Digital Object Identifier (DOI)
Additional Document Info
start page
- 419
end page
- 429
volume
- 130