The mechanical properties of atomic layer deposited alumina for use in micro- and nano-electromechanical systems Journal Article uri icon

Overview

publication date

  • August 14, 2006

has restriction

  • closed

Date in CU Experts

  • September 6, 2013 12:44 PM

Full Author List

  • Tripp MK; Stampfer C; Miller DC; Helbling T; Hermann CF; Hierold C; Gall K; George SM; Bright VM

author count

  • 9

citation count

  • 150

Other Profiles

International Standard Serial Number (ISSN)

  • 0924-4247

Additional Document Info

start page

  • 419

end page

  • 429

volume

  • 130