The mechanical properties of atomic layer deposited alumina for use in micro- and nano-electromechanical systems Journal Article

Overview

CU Boulder Authors

publication date

August 14, 2006

Full Author List

Tripp MK; Stampfer C; Miller DC; Helbling T; Hermann CF; Hierold C; Gall K; George SM; Bright VM

published in

Sensors and Actuators A: Physical Journal

Other Profiles

Digital Object Identifier (DOI)

10.1016/j.sna.2006.01.029

Additional Document Info

start page

419

end page

429

volume

130