The mechanical properties of atomic layer deposited alumina for use in micro- and nano-electromechanical systems Journal Article uri icon


publication date

  • August 14, 2006

Full Author List

  • Tripp MK; Stampfer C; Miller DC; Helbling T; Hermann CF; Hierold C; Gall K; George SM; Bright VM

Other Profiles

Additional Document Info

start page

  • 419

end page

  • 429


  • 130