Sacrificial layers for air gaps in NEMS using alucone molecular layer deposition Journal Article
Overview
publication date
- October 1, 2009
Date in CU Experts
- September 6, 2013 12:44 PM
Full Author List
- Seghete D; Davidson BD; Hall RA; Chang YJ; Bright VM; George SM
author count
- 6
citation count
- 19
published in
Other Profiles
International Standard Serial Number (ISSN)
- 0924-4247
Digital Object Identifier (DOI)
Additional Document Info
start page
- 8
end page
- 15
volume
- 155
issue
- 1