Sacrificial layers for air gaps in NEMS using alucone molecular layer deposition Journal Article uri icon

Overview

publication date

  • October 1, 2009

Date in CU Experts

  • September 6, 2013 12:44 PM

Full Author List

  • Seghete D; Davidson BD; Hall RA; Chang YJ; Bright VM; George SM

author count

  • 6

citation count

  • 19

Other Profiles

International Standard Serial Number (ISSN)

  • 0924-4247

Additional Document Info

start page

  • 8

end page

  • 15

volume

  • 155

issue

  • 1