Sacrificial layers for air gaps in NEMS using alucone molecular layer deposition Journal Article uri icon

Overview

publication date

  • October 1, 2009

Full Author List

  • Seghete D; Davidson BD; Hall RA; Chang YJ; Bright VM; George SM

Other Profiles

Additional Document Info

start page

  • 8

end page

  • 15

volume

  • 155

issue

  • 1