Micromachined resonators of high Q-factor based on atomic layer deposited alumina Journal Article uri icon

Overview

publication date

  • September 24, 2009

Full Author List

  • Chang Y-J; Gray JM; Imtiaz A; Seghete D; Wallis TM; George SM; Kabos P; Rogers CT; Bright VM

Other Profiles

Additional Document Info

start page

  • 229

end page

  • 237

volume

  • 154

issue

  • 2