Micromachined resonators of high Q-factor based on atomic layer deposited alumina
Journal Article
Overview
publication date
- September 24, 2009
Full Author List
- Chang Y-J; Gray JM; Imtiaz A; Seghete D; Wallis TM; George SM; Kabos P; Rogers CT; Bright VM
published in
Other Profiles
Digital Object Identifier (DOI)
Additional Document Info
start page
- 229
end page
- 237
volume
- 154
issue
- 2