ALD tungsten NEMS switches and tunneling devices Journal Article

Overview

CU Boulder Authors

• Bright, Victor Mark
• George, Steven

publication date

• April 1, 2011

Full Author List

• Davidson BD; Seghete D; George SM; Bright VM

published in

• Sensors and Actuators A: Physical  Journal

Other Profiles

Digital Object Identifier (DOI)

• 10.1016/j.sna.2009.07.022

Additional Document Info

start page

• 269

end page

• 276

volume

• 166

issue

• 2