New methodologies for measuring film thickness, coverage, and topography Conference Proceeding uri icon

Overview

publication date

  • August 9, 1999

Full Author List

  • Mate CM; Yen BK; Miller DC; Toney MF; Scarpulla M; Frommer JE

Other Profiles

Additional Document Info

start page

  • 110

end page

  • 114

volume

  • 36

issue

  • 1