Thermal atomic layer etching of germanium-rich SiGe using an oxidation and "conversion-etch" mechanism Journal Article uri icon

Overview

publication date

  • March 1, 2021

has restriction

  • hybrid

Date in CU Experts

  • May 5, 2021 12:42 PM

Full Author List

  • Abdulagatov AI; Sharma V; Murdzek JA; Cavanagh AS; George SM

author count

  • 5

citation count

  • 6

Other Profiles

International Standard Serial Number (ISSN)

  • 0734-2101

Electronic International Standard Serial Number (EISSN)

  • 1520-8559

Additional Document Info

volume

  • 39

issue

  • 2

number

  • ARTN 022602