Thermal atomic layer etching: A review Journal Article

Overview

CU Boulder Authors

• George, Steven

publication date

• May 1, 2021

has restriction

• closed

Date in CU Experts

• May 5, 2021 12:43 PM

Full Author List

• Fischer A; Routzahn A; George SM; Lill T

author count

• 4

citation count

• 56

published in

• Journal of Vacuum Science and Technology Part A: International Journal Devoted to Vacuum, Surfaces, and Films   Journal

Other Profiles

International Standard Serial Number (ISSN)

• 0734-2101

Electronic International Standard Serial Number (EISSN)

• 1520-8559

Digital Object Identifier (DOI)

• https://doi.org/10.1116/6.0000894

Additional Document Info

volume

• 39

issue

• 3

number

• ARTN 030801