Conversion reactions in atomic layer processing with emphasis on ZnO conversion to Al2O3 by trimethylaluminum Journal Article uri icon

Overview

publication date

  • March 1, 2021

has restriction

  • closed

Date in CU Experts

  • May 5, 2021 12:43 PM

Full Author List

  • Myers TJ; Cano AM; Lancaster DK; Clancey JW; George SM

author count

  • 5

citation count

  • 15

Other Profiles

International Standard Serial Number (ISSN)

  • 0734-2101

Electronic International Standard Serial Number (EISSN)

  • 1520-8559

Additional Document Info

volume

  • 39

issue

  • 2

number

  • ARTN 021001