Hollow cathode plasma electron source for low temperature deposition of cobalt films by electron-enhanced atomic layer deposition Journal Article uri icon

Overview

publication date

  • July 1, 2021

has restriction

  • hybrid

Date in CU Experts

  • July 2, 2021 4:25 AM

Full Author List

  • Sobell ZC; Cavanagh AS; Boris DR; Walton SG; George SM

author count

  • 5

citation count

  • 6

Other Profiles

International Standard Serial Number (ISSN)

  • 0734-2101

Electronic International Standard Serial Number (EISSN)

  • 1520-8559

Additional Document Info

volume

  • 39

issue

  • 4

number

  • ARTN 042403