Thermal atomic layer etching of amorphous and crystalline Al2O3 films Journal Article uri icon

Overview

publication date

  • July 1, 2021

has restriction

  • hybrid

Date in CU Experts

  • July 2, 2021 6:45 AM

Full Author List

  • Murdzek JA; Rajashekhar A; Makala RS; George SM

author count

  • 4

citation count

  • 18

Other Profiles

International Standard Serial Number (ISSN)

  • 0734-2101

Electronic International Standard Serial Number (EISSN)

  • 1520-8559

Additional Document Info

volume

  • 39

issue

  • 4

number

  • ARTN 042602