Spatial atomic layer deposition: A route towards further industrialization of atomic layer deposition Journal Article uri icon

Overview

publication date

  • January 1, 2012

Full Author List

  • Poodt P; Cameron DC; Dickey E; George SM; Kuznetsov V; Parsons GN; Roozeboom F; Sundaram G; Vermeer A

Other Profiles

Additional Document Info

volume

  • 30

issue

  • 1