Atomic layer controlled deposition of Al2O3 films using binary reaction sequence chemistry
Journal Article
Overview
publication date
- November 1, 1996
has restriction
- closed
Date in CU Experts
- September 6, 2013 4:38 AM
Full Author List
- Ott AW; McCarley KC; Klaus JW; Way JD; George SM
author count
- 5
citation count
- 120
published in
- Applied Surface Science Journal
Other Profiles
International Standard Serial Number (ISSN)
- 0169-4332
Digital Object Identifier (DOI)
Additional Document Info
start page
- 128
end page
- 136
volume
- 107