Atomic layer controlled deposition of Al2O3 films using binary reaction sequence chemistry Journal Article uri icon

Overview

publication date

  • November 1, 1996

Date in CU Experts

  • September 6, 2013 4:38 AM

Full Author List

  • Ott AW; McCarley KC; Klaus JW; Way JD; George SM

author count

  • 5

citation count

  • 115

Other Profiles

International Standard Serial Number (ISSN)

  • 0169-4332

Additional Document Info

start page

  • 128

end page

  • 136

volume

  • 107