MODELING SILICON EPITAXIAL-GROWTH WITH SIH2CL2 Journal Article uri icon

Overview

publication date

  • May 1, 1993

has restriction

  • closed

Date in CU Experts

  • September 6, 2013 4:38 AM

Full Author List

  • COON PA; WISE ML; GEORGE SM

author count

  • 3

citation count

  • 23

Other Profiles

International Standard Serial Number (ISSN)

  • 0022-0248

Additional Document Info

start page

  • 162

end page

  • 172

volume

  • 130

issue

  • 1-2