Surface chemistry of In2O3 deposition using In(CH3)(3) and H2O in a binary reaction sequence Journal Article uri icon

Overview

publication date

  • March 1, 1997

Full Author List

  • Ott AW; Johnson JM; Klaus JW; George SM

Other Profiles

Additional Document Info

start page

  • 205

end page

  • 215

volume

  • 112