ISOTHERMAL H-2 DESORPTION-KINETICS FROM SI(100)2X1 - DEPENDENCE ON DISILANE AND ATOMIC-HYDROGEN PRECURSORS Journal Article uri icon

Overview

publication date

  • December 1, 1994

Full Author List

  • OKADA LA; WISE ML; GEORGE SM

Other Profiles

Additional Document Info

start page

  • 410

end page

  • 416

volume

  • 82-3