ADSORPTION AND DECOMPOSITION OF TRICHLOROSILANE AND TRICHLOROGERMANE ON POROUS SILICON AND SI(100)2X1 SURFACES Journal Article uri icon

Overview

publication date

  • January 1, 1995

Full Author List

  • DILLON AC; WISE ML; ROBINSON MB; GEORGE SM

Other Profiles

Additional Document Info

start page

  • 1

end page

  • 10

volume

  • 13

issue

  • 1