ADSORPTION AND DECOMPOSITION OF TRICHLOROSILANE AND TRICHLOROGERMANE ON POROUS SILICON AND SI(100)2X1 SURFACES Journal Article uri icon

Overview

publication date

  • January 1, 1995

has restriction

  • closed

Date in CU Experts

  • September 6, 2013 4:39 AM

Full Author List

  • DILLON AC; WISE ML; ROBINSON MB; GEORGE SM

author count

  • 4

citation count

  • 25

Other Profiles

International Standard Serial Number (ISSN)

  • 0734-2101

Additional Document Info

start page

  • 1

end page

  • 10

volume

  • 13

issue

  • 1