Adsorption and desorption kinetics of tetrakis(dimethylamino)titanium and dimethylamine on TiN surfaces Journal Article uri icon

Overview

publication date

  • January 1, 1999

Full Author List

  • Okada LA; George SM

Other Profiles

Additional Document Info

start page

  • 113

end page

  • 124

volume

  • 137

issue

  • 1-4