ATOMIC LAYER CONTROLLED DEPOSITION OF SIO2 AND AL2O3 USING ABAB - BINARY REACTION SEQUENCE CHEMISTRY Journal Article uri icon

Overview

publication date

  • December 1, 1994

Full Author List

  • GEORGE SM; SNEH O; DILLON AC; WISE ML; OTT AW; OKADA LA; WAY JD

Other Profiles

Additional Document Info

start page

  • 460

end page

  • 467

volume

  • 82-3