ATOMIC LAYER CONTROLLED DEPOSITION OF SIO2 AND AL2O3 USING ABAB - BINARY REACTION SEQUENCE CHEMISTRY Journal Article uri icon

Overview

publication date

  • December 1, 1994

Date in CU Experts

  • September 6, 2013 4:39 AM

Full Author List

  • GEORGE SM; SNEH O; DILLON AC; WISE ML; OTT AW; OKADA LA; WAY JD

author count

  • 7

citation count

  • 81

Other Profiles

International Standard Serial Number (ISSN)

  • 0169-4332

Additional Document Info

start page

  • 460

end page

  • 467

volume

  • 82-3