Evaluating operating conditions for continuous atmospheric atomic layer deposition using a multiple slit gas source head Journal Article uri icon

Overview

publication date

  • January 1, 2012

has restriction

  • closed

Date in CU Experts

  • September 6, 2013 4:39 AM

Full Author List

  • Fitzpatrick PR; Gibbs ZM; George SM

author count

  • 3

citation count

  • 25

Other Profiles

International Standard Serial Number (ISSN)

  • 0734-2101

Additional Document Info

volume

  • 30

issue

  • 1

number

  • ARTN 01A136