Infrared spectroscopic study of atomic layer deposition mechanism for hafnium silicate thin films using HfCl2[N(SiMe3)(2)](2) and H2O Journal Article uri icon

Overview

publication date

  • November 1, 2004

Full Author List

  • Kang SW; Rhee SW; George SM

Other Profiles

Additional Document Info

start page

  • 2392

end page

  • 2397

volume

  • 22

issue

  • 6